Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics

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dc.contributor.author Al-Kuzee, J.
dc.contributor.author Matsuura, T.
dc.contributor.author Goodyear, A.
dc.contributor.author Nolle, L.
dc.contributor.author Hopgood, Adrian A.
dc.contributor.author Picton, P. D.
dc.contributor.author Braithwaite, Nicholas (Nicholas St. J.)
dc.date.accessioned 2009-02-27T13:18:32Z
dc.date.available 2009-02-27T13:18:32Z
dc.date.issued 2004
dc.identifier.citation Al-Kuzee, J., Matsuura, T., Goodyear, A.,Nolle, L., Hopgood, A.A., Picton, P..D. and Braithwaite N.S. (2004) Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics. Plasma Sources Science and Technology, 13 , pp 612 - 622 en
dc.identifier.issn 0963-0252
dc.identifier.uri http://hdl.handle.net/2086/983
dc.language.iso en en
dc.title Optimization of plasma etch processes using evolutionary search methods with in situ diagnostics en
dc.type Article en
dc.identifier.doi https://doi.org/10.1088/0963-0252/13/4/010
dc.researchgroup Centre for Computational Intelligence


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