Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors

Date
2012
Authors
Milanov, Andrian P.
Xu, Ke
Cwik, Stefan
Parala, Harish
De Los Arcos, T.
Becker, Hans-Werner
Rogalla, Detlef
Cross, R. B. M.
Paul, Shashi
Devi, Anjana
Journal Title
Journal ISSN
ISSN
1477-9226
Volume Title
Publisher
Royal Society of Chemistry
Peer reviewed
Yes
Abstract
Description
Keywords
Citation
Milanov, A.P. et al (2012) Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors. Dalton Transactions, 45, pp. 13936-13947
Research Institute
Institute of Engineering Sciences (IES)