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De Montfort University Open Research Archive

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Sc 2O 3, Er 2O 3, and Y 2O 3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors 98

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Sc 2O 3, Er 2O 3, and Y 2O 3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors 6 0 0 0 2 0 0

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