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De Montfort University Open Research Archive

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AlN films deposited under various nitrogen concentrations by RF reactive sputtering. 225

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February 2015 March 2015 April 2015 May 2015 June 2015 July 2015 August 2015
AlN films deposited under various nitrogen concentrations by RF reactive sputtering. 1 1 0 0 4 0 0

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