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Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors
(Royal Society of Chemistry, 2012)
Rare-earth substituted HfO2 thin films grown by metalorganic chemical vapor deposition.
Thin films of HfGdOx and HfDyOx were deposited by metalorganic chemical vapor deposition (MOCVD) utilizing guanidinate precursors for Hf, Gd and Dy. The close match in the thermal properties of the precursors enabled the ...